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Study on photoelectricity properties of SiCN thin films prepared by magnetron sputtering
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Authors
Li, Qiang
;
Chen, Cheng
;
Wang, Mingge
;
Lv, Yaohui
;
Mao, Yulu
;
Xu, Manzhang
;
Wang, Yingnan
;
Wang, Xuewen
;
Zhang, Zhiyong
;
Wang, Shouguo
;
Zhao, Wu
;
Stiens, Johan
DOI
10.1016/j.jmrt.2021.08.043
ISSN
2238-7854
Issue
na
Journal
JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T
Volume
15
Title
Study on photoelectricity properties of SiCN thin films prepared by magnetron sputtering
Publication type
Journal article
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2
20.500.12860/38705.2
*
2022-06-16T12:13:33Z
validation by library/open access desk
1
20.500.12860/38705
2022-01-02T02:06:29Z
*Selected version
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