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Electrochemical study of copper depostion on silicon surfaces in HF solutions
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Authors
Teerlinck, Ivo
;
Gomes, W. P.
;
Strubbe, K.
;
Mertens, Paul
;
Heyns, Marc
Conference
Electrochemical Processing in ULSI Fabrication and Semiconductor/Metal Deposition II
Title
Electrochemical study of copper depostion on silicon surfaces in HF solutions
Publication type
Proceedings paper
Embargo date
9999-12-31
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