Probing nitride thin films in 3-dimensions using a variable energy electron beam

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Authors
Trager-Cowan, C.; Middleton, P. G.; Mohammed, A.; Manson-Smith, S. K.; Osborne, I.; Barisonzi, M.; O'Donnell, K. P.; Van der Stricht, Wim; Jacobs, Koen; Moerman, Ingrid; Demeester, Piet
Conference
MRS Fall Meeting; November 1999; Boston, USA.
Title
Probing nitride thin films in 3-dimensions using a variable energy electron beam
Publication type
Oral presentation
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