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Probing the properties of nitride thin films in 3-dimensions using a variable energy beam

dc.contributor.authorTrager-Cowan, C.
dc.contributor.authorMiddleton, P. J.
dc.contributor.authorMohammed, A.
dc.contributor.authorManson-Smith, S. K.
dc.contributor.authorO'Donnell, K. P.
dc.contributor.authorVan der Stricht, Wim
dc.contributor.authorMoerman, Ingrid
dc.contributor.authorDemeester, Piet
dc.date.accessioned2021-10-14T11:43:26Z
dc.date.available2021-10-14T11:43:26Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3883
dc.sourceIIOimport
dc.titleProbing the properties of nitride thin films in 3-dimensions using a variable energy beam
dc.typeOral presentation
dc.contributor.imecauthorMoerman, Ingrid
dc.contributor.imecauthorDemeester, Piet
dc.contributor.orcidimecMoerman, Ingrid::0000-0003-2377-3674
dc.contributor.orcidimecDemeester, Piet::0000-0003-2810-3899
dc.source.peerreviewno
dc.source.conference11th International Conference on Microscopy of Semiconducting Materials
dc.source.conferencedate22/03/1999
dc.source.conferencelocationOxford UK
imec.availabilityPublished - imec
imec.internalnotesNot in proceedings!


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