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Evaluating probes for "electrical" atomic force microscopy

dc.contributor.authorTrenkler, Thomas
dc.contributor.authorHantschel, Thomas
dc.contributor.authorStephenson, Robert
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorHellemans, L.
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMalavé, A.
dc.contributor.authorBüchel, D.
dc.contributor.authorOesterschulze, E.
dc.contributor.authorKulisch, W.
dc.contributor.authorNiedermann, P.
dc.contributor.authorSulzbach, T.
dc.contributor.authorOhlsson, O.
dc.date.accessioned2021-10-14T11:44:05Z
dc.date.available2021-10-14T11:44:05Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3890
dc.sourceIIOimport
dc.titleEvaluating probes for "electrical" atomic force microscopy
dc.typeProceedings paper
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage423
dc.source.endpage436
dc.source.conferenceProceedings 5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Se
dc.source.conferencedate28/03/1999
dc.source.conferencelocationResearch Triangle Park, NC USA
imec.availabilityPublished - open access


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