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Characterization of conductive probes for atomic force microscopy

dc.contributor.authorTrenkler, Thomas
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHellemans, L.
dc.contributor.authorKulisch, W.
dc.contributor.authorOesterschulze, E.
dc.contributor.authorNiedermann, P.
dc.contributor.authorSulzbach, T.
dc.date.accessioned2021-10-14T11:44:10Z
dc.date.available2021-10-14T11:44:10Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3891
dc.sourceIIOimport
dc.titleCharacterization of conductive probes for atomic force microscopy
dc.typeProceedings paper
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1168
dc.source.endpage1179
dc.source.conferenceDesign, Test, and Microfabrication of MEMS and MOEMS; 30 March - 1 April 1999; Paris, France.
dc.source.conferencedate30/03/1999
dc.source.conferencelocationParis France
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 3680


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