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Influence of CH4H2 reactive ion etching on the electrical and optical properties of AlGaAs/InGaAs/GaAs heterostructures

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2037 since deposited on 2021-09-29
1last month
Acq. date: 2026-02-06

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2037 since deposited on 2021-09-29
1last month
Acq. date: 2026-02-06

Citations