Authors

van Es, C. M.; Eijkemans, T. J.; Wolter, J. H.; Pereira, Ricardo; Van Hove, Marleen; Van Rossum, Marc

Conference

1st International Conference on Materials for Microelectronics

Title

Influence of CH4H2 reactive ion etching on the electrical and optical properties of AlGaAs/InGaAs/GaAs heterostructures

Publication type

Oral presentation

Embargo date

9999-12-31