Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch

Takabayashi, Alain Yuji; Sattari, Hamed; Edinger, Pierre; Verheyen, Peter; Gylfason, Kristinn B.; Bogaerts, Wim; Quack, Niels

doi:10.1109/jmems.2021.3060182

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Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch

Date

2021

Journal article

https://doi.org/10.1109/jmems.2021.3060182

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Author(s)

Takabayashi, Alain Yuji

;

Sattari, Hamed

;

Edinger, Pierre

;

Verheyen, Peter

;

Gylfason, Kristinn B.

;

Bogaerts, Wim

;

Quack, Niels

Journal

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

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Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch

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