Characterization of through-silicon vias using laser terahertz emission microscopy

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Authors

Murakami, Hironaru; Murakami, Fumikazu; Serita, Kazunori; Tonouchi, Masayoshi; Jacobs, Kristof; Beyne, Eric

DOI

10.1038/s41928-021-00559-z

ISSN

2520-1131

Issue

3

Journal

NATURE ELECTRONICS

Volume

4

Title

Characterization of through-silicon vias using laser terahertz emission microscopy

Publication type

Journal article

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