Publication:

EUV scattering from CNT pellicles: measurement and control

Date

2021

Proceedings Paper

https://doi.org/10.1117/12.2584718

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Author(s)

Pollentier, Ivan

;

Luettgenau, Bernhard

;

;

Timmermans, Marina

;

Huyghebaert, Cedric

;

;

Gallagher, Emily

Journal

Proceedings of SPIE

Statistics

1806 since deposited on 2022-03-11

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Acq. date: 2026-10-10