EUV scattering from CNT pellicles: measurement and control

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Authors
Pollentier, Ivan; Luettgenau, Bernhard; Brose, Sascha; Timmermans, Marina; Huyghebaert, Cedric; Brems, Steven; Gallagher, Emily
DOI
10.1117/12.2584718
EISBN
978-1-5106-4052-8
ISBN
978-1-5106-4051-1
ISSN
0277-786X
Conference
Conference on Extreme Ultraviolet (EUV) Lithography XII
Journal
Proceedings of SPIE
Volume
11609
Title
EUV scattering from CNT pellicles: measurement and control
Publication type
Proceedings paper
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