dc.contributor.author | Rio, D. | |
dc.contributor.author | Van Adrichem, P. | |
dc.contributor.author | Delorme, M. | |
dc.contributor.author | Lyakhova, K. | |
dc.contributor.author | Spence, C. | |
dc.contributor.author | Franke, Joern-Holger | |
dc.date.accessioned | 2022-03-11T13:23:35Z | |
dc.date.available | 2022-03-11T13:23:35Z | |
dc.date.issued | 2021 | |
dc.identifier.isbn | 978-1-5106-4051-1 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000672825700015 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39412 | |
dc.source | WOS | |
dc.title | Extending 0.33NA EUVL to 28 nm pitch using alternative mask and controlled aberrations | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Franke, Joern-Holger | |
dc.contributor.orcidimec | Franke, Joern-Holger::0000-0002-3571-1633 | |
dc.identifier.doi | 10.1117/12.2583800 | |
dc.identifier.eisbn | 978-1-5106-4052-8 | |
dc.source.numberofpages | 16 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 116090T | |
dc.source.conference | Conference on Extreme Ultraviolet (EUV) Lithography XII | |
dc.source.conferencedate | FEB 22-26, 2021 | |
dc.source.conferencelocation | Virtual | |
dc.source.journal | Proceedings of SPIE | |
dc.source.volume | 11609 | |
imec.availability | Published - imec | |