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Process-induced charging damage in IGZO nTFTs

dc.contributor.authorHiblot, Gaspard
dc.contributor.authorRassoul, Nouredine
dc.contributor.authorTeugels, Lieve
dc.contributor.authorDevriendt, Katia
dc.contributor.authorVaisman Chasin, Adrian
dc.contributor.authorvan Setten, Michiel
dc.contributor.authorBelmonte, Attilio
dc.contributor.authorDelhougne, Romain
dc.contributor.authorKar, Gouri Sankar
dc.date.accessioned2022-03-11T14:19:48Z
dc.date.available2022-03-11T14:19:48Z
dc.date.issued2021
dc.identifier.issn1541-7026
dc.identifier.otherWOS:000672563100110
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39421
dc.sourceWOS
dc.titleProcess-induced charging damage in IGZO nTFTs
dc.typeProceedings paper
dc.contributor.imecauthorHiblot, Gaspard
dc.contributor.imecauthorRassoul, Nouredine
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorVaisman Chasin, Adrian
dc.contributor.imecauthorvan Setten, Michiel
dc.contributor.imecauthorBelmonte, Attilio
dc.contributor.imecauthorDelhougne, Romain
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.orcidimecHiblot, Gaspard::0000-0002-3869-965X
dc.contributor.orcidimecRassoul, Nouredine::0000-0001-9489-3396
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecvan Setten, Michiel::0000-0003-0557-5260
dc.contributor.orcidimecVaisman Chasin, Adrian::0000-0002-9940-0260
dc.identifier.doi10.1109/IRPS46558.2021.9405201
dc.identifier.eisbn978-1-7281-6893-7
dc.source.numberofpages8
dc.source.peerreviewyes
dc.source.conferenceIEEE International Reliability Physics Symposium (IRPS)
dc.source.conferencedateMAR 21-24, 2021
dc.source.conferencelocationVirtual
dc.source.journalna
imec.availabilityPublished - imec


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