Show simple item record

Reliability of a DME Ru Semidamascene scheme with 16 nm wide Airgaps

dc.contributor.authorLesniewska, Alicja
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorLofrano, Melina
dc.contributor.authorMurdoch, Gayle
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorDangol, Anish
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorTokei, Zsolt
dc.contributor.authorCroes, Kristof
dc.date.accessioned2022-03-11T14:30:34Z
dc.date.available2022-03-11T14:30:34Z
dc.date.issued2021
dc.identifier.issn1541-7026
dc.identifier.otherWOS:000672563100101
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39423
dc.sourceWOS
dc.titleReliability of a DME Ru Semidamascene scheme with 16 nm wide Airgaps
dc.typeProceedings paper
dc.contributor.imecauthorLesniewska, Alicja
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorLofrano, Melina
dc.contributor.imecauthorMurdoch, Gayle
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorDangol, Anish
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorCroes, Kristof
dc.contributor.orcidimecLesniewska, Alicja::0000-0003-3863-065X
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.identifier.doi10.1109/IRPS46558.2021.9405192
dc.identifier.eisbn978-1-7281-6893-7
dc.source.numberofpages6
dc.source.peerreviewyes
dc.source.conferenceIEEE International Reliability Physics Symposium (IRPS)
dc.source.conferencedateMAR 21-24, 2021
dc.source.conferencelocationVirtual
dc.source.journalna
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record