Publication:

Reliability of a DME Ru Semidamascene scheme with 16 nm wide Airgaps

Date

2021
Proceedings Paper
https://doi.org/10.1109/irps46558.2021.9405192
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Author(s)

Lesniewska, Alicja  
;
Varela Pedreira, Olalla  
;
Lofrano, Melina  
;
Murdoch, Gayle  
;
van der Veen, Marleen  
;
Dangol, Anish  
;
Horiguchi, Naoto  
;
Tokei, Zsolt  
;
Croes, Kristof  

Journal

na

Abstract

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1906 since deposited on 2022-03-11
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Acq. date: 2026-08-10

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