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Reliability of a DME Ru Semidamascene scheme with 16 nm wide Airgaps
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Authors
Lesniewska, Alicja
;
Varela Pedreira, Olalla
;
Lofrano, Melina
;
Murdoch, Gayle
;
van der Veen, Marleen
;
Dangol, Anish
;
Horiguchi, Naoto
;
Tokei, Zsolt
;
Croes, Kristof
DOI
10.1109/IRPS46558.2021.9405192
EISBN
978-1-7281-6893-7
ISSN
1541-7026
Conference
IEEE International Reliability Physics Symposium (IRPS)
Journal
na
Title
Reliability of a DME Ru Semidamascene scheme with 16 nm wide Airgaps
Publication type
Proceedings paper
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