Publication:

Reliability of a DME Ru Semidamascene scheme with 16 nm wide Airgaps

Date

2021

Proceedings Paper

https://doi.org/10.1109/irps46558.2021.9405192

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Author(s)

Lesniewska, Alicja

;

Varela Pedreira, Olalla

;

Lofrano, Melina

;

;

van der Veen, Marleen

;

;

Horiguchi, Naoto

;

;

Journal

na

Statistics

1909 since deposited on 2022-03-11

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Acq. date: 2026-10-08