Publication:
Reliability of a DME Ru Semidamascene scheme with 16 nm wide Airgaps
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1893 since deposited on 2022-03-11
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Acq. date: 2025-12-15
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Views
1893 since deposited on 2022-03-11
1last month
1last week
Acq. date: 2025-12-15
Citations