Publication:
Reliability of a DME Ru Semidamascene scheme with 16 nm wide Airgaps
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1895 since deposited on 2022-03-11
3last month
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Acq. date: 2026-01-10
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Views
1895 since deposited on 2022-03-11
3last month
2last week
Acq. date: 2026-01-10
Citations