Publication:

Reliability of a DME Ru Semidamascene scheme with 16 nm wide Airgaps

Date

2021
Proceedings Paper
https://doi.org/10.1109/IRPS46558.2021.9405192
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dc.contributor.authorLesniewska, Alicja
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorLofrano, Melina
dc.contributor.authorMurdoch, Gayle
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorDangol, Anish
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorTokei, Zsolt
dc.contributor.authorCroes, Kristof
dc.contributor.imecauthorLesniewska, Alicja
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorLofrano, Melina
dc.contributor.imecauthorMurdoch, Gayle
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorDangol, Anish
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorCroes, Kristof
dc.contributor.orcidimecLesniewska, Alicja::0000-0003-3863-065X
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.date.accessioned2022-03-11T14:30:34Z
dc.date.available2022-03-11T14:30:34Z
dc.date.issued2021
dc.identifier.doi10.1109/IRPS46558.2021.9405192
dc.identifier.eisbn978-1-7281-6893-7
dc.identifier.issn1541-7026
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39423
dc.publisherIEEE
dc.source.conferenceIEEE International Reliability Physics Symposium (IRPS)
dc.source.conferencedateMAR 21-24, 2021
dc.source.conferencelocationVirtual
dc.source.journalna
dc.source.numberofpages6
dc.title

Reliability of a DME Ru Semidamascene scheme with 16 nm wide Airgaps

dc.typeProceedings paper
dspace.entity.typePublication
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