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Reliability and Variability-Aware DTCO Flow: Demonstration of Projections to N3 FinFET and Nanosheet Technologies

dc.contributor.authorRzepa, G.
dc.contributor.authorKarner, M.
dc.contributor.authorBaumgartner, O.
dc.contributor.authorStrof, G.
dc.contributor.authorSchanovsky, F.
dc.contributor.authorMitterbauer, F.
dc.contributor.authorKernstock, C.
dc.contributor.authorKarner, H. W.
dc.contributor.authorStanojevic, Z.
dc.contributor.authorWeckx, Pieter
dc.contributor.authorHellings, Geert
dc.contributor.authorClaes, Dieter
dc.contributor.authorWu, Zhicheng
dc.contributor.authorXiang, Yang
dc.contributor.authorChiarella, Thomas
dc.contributor.authorParvais, Bertrand
dc.contributor.authorMitard, Jerome
dc.contributor.authorFranco, Jacopo
dc.contributor.authorKaczer, Ben
dc.contributor.authorLinten, Dimitri
dc.date.accessioned2022-03-11T14:37:40Z
dc.date.available2022-03-11T14:37:40Z
dc.date.issued2021
dc.identifier.issn1541-7026
dc.identifier.otherWOS:000672563100083
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39424
dc.sourceWOS
dc.titleReliability and Variability-Aware DTCO Flow: Demonstration of Projections to N3 FinFET and Nanosheet Technologies
dc.typeProceedings paper
dc.contributor.imecauthorWeckx, Pieter
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorClaes, Dieter
dc.contributor.imecauthorWu, Zhicheng
dc.contributor.imecauthorXiang, Yang
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorParvais, Bertrand
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.orcidimecParvais, B.::0000-0003-0769-7069
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecXiang, Yang::0000-0003-0091-6935
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecParvais, Bertrand::0000-0003-0769-7069
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.identifier.doi10.1109/IRPS46558.2021.9405172
dc.identifier.eisbn978-1-7281-6893-7
dc.source.numberofpages6
dc.source.peerreviewyes
dc.source.conferenceIEEE International Reliability Physics Symposium (IRPS)
dc.source.conferencedateMAR 21-24, 2021
dc.source.conferencelocationVirtual
dc.source.journalna
imec.availabilityPublished - imec


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