Reliability and Variability-Aware DTCO Flow: Demonstration of Projections to N3 FinFET and Nanosheet Technologies

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Authors
Rzepa, G.; Karner, M.; Baumgartner, O.; Strof, G.; Schanovsky, F.; Mitterbauer, F.; Kernstock, C.; Karner, H. W.; Stanojevic, Z.; Weckx, Pieter; Hellings, Geert; Claes, Dieter; Wu, Zhicheng; Xiang, Yang; Chiarella, Thomas; Parvais, Bertrand; Mitard, Jerome; Franco, Jacopo; Kaczer, Ben; Linten, Dimitri
DOI
10.1109/IRPS46558.2021.9405172
EISBN
978-1-7281-6893-7
ISSN
1541-7026
Conference
IEEE International Reliability Physics Symposium (IRPS)
Journal
na
Title
Reliability and Variability-Aware DTCO Flow: Demonstration of Projections to N3 FinFET and Nanosheet Technologies
Publication type
Proceedings paper
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