Publication:
Reliability and Variability-Aware DTCO Flow: Demonstration of Projections to N3 FinFET and Nanosheet Technologies
| dc.contributor.author | Rzepa, G. | |
| dc.contributor.author | Karner, M. | |
| dc.contributor.author | Baumgartner, O. | |
| dc.contributor.author | Strof, G. | |
| dc.contributor.author | Schanovsky, F. | |
| dc.contributor.author | Mitterbauer, F. | |
| dc.contributor.author | Kernstock, C. | |
| dc.contributor.author | Karner, H. W. | |
| dc.contributor.author | Stanojevic, Z. | |
| dc.contributor.author | Weckx, Pieter | |
| dc.contributor.author | Hellings, Geert | |
| dc.contributor.author | Claes, Dieter | |
| dc.contributor.author | Wu, Zhicheng | |
| dc.contributor.author | Xiang, Yang | |
| dc.contributor.author | Chiarella, Thomas | |
| dc.contributor.author | Parvais, Bertrand | |
| dc.contributor.author | Mitard, Jerome | |
| dc.contributor.author | Franco, Jacopo | |
| dc.contributor.author | Kaczer, Ben | |
| dc.contributor.author | Linten, Dimitri | |
| dc.contributor.imecauthor | Weckx, Pieter | |
| dc.contributor.imecauthor | Hellings, Geert | |
| dc.contributor.imecauthor | Claes, Dieter | |
| dc.contributor.imecauthor | Wu, Zhicheng | |
| dc.contributor.imecauthor | Xiang, Yang | |
| dc.contributor.imecauthor | Chiarella, Thomas | |
| dc.contributor.imecauthor | Parvais, Bertrand | |
| dc.contributor.imecauthor | Mitard, Jerome | |
| dc.contributor.imecauthor | Franco, Jacopo | |
| dc.contributor.imecauthor | Kaczer, Ben | |
| dc.contributor.imecauthor | Linten, Dimitri | |
| dc.contributor.orcidimec | Parvais, B.::0000-0003-0769-7069 | |
| dc.contributor.orcidimec | Hellings, Geert::0000-0002-5376-2119 | |
| dc.contributor.orcidimec | Xiang, Yang::0000-0003-0091-6935 | |
| dc.contributor.orcidimec | Chiarella, Thomas::0000-0002-6155-9030 | |
| dc.contributor.orcidimec | Parvais, Bertrand::0000-0003-0769-7069 | |
| dc.contributor.orcidimec | Mitard, Jerome::0000-0002-7422-079X | |
| dc.contributor.orcidimec | Franco, Jacopo::0000-0002-7382-8605 | |
| dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
| dc.contributor.orcidimec | Linten, Dimitri::0000-0001-8434-1838 | |
| dc.date.accessioned | 2022-03-11T14:37:40Z | |
| dc.date.available | 2022-03-11T14:37:40Z | |
| dc.date.issued | 2021 | |
| dc.identifier.doi | 10.1109/IRPS46558.2021.9405172 | |
| dc.identifier.eisbn | 978-1-7281-6893-7 | |
| dc.identifier.issn | 1541-7026 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39424 | |
| dc.publisher | IEEE | |
| dc.source.conference | IEEE International Reliability Physics Symposium (IRPS) | |
| dc.source.conferencedate | MAR 21-24, 2021 | |
| dc.source.conferencelocation | Virtual | |
| dc.source.journal | na | |
| dc.source.numberofpages | 6 | |
| dc.subject.keywords | IMPACT | |
| dc.title | Reliability and Variability-Aware DTCO Flow: Demonstration of Projections to N3 FinFET and Nanosheet Technologies | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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