Publication:

Reliability and Variability-Aware DTCO Flow: Demonstration of Projections to N3 FinFET and Nanosheet Technologies

Date

2021
Proceedings Paper
https://doi.org/10.1109/IRPS46558.2021.9405172
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Author(s)

Rzepa, G.
;
Karner, M.
;
Baumgartner, O.
;
Strof, G.
;
Schanovsky, F.
;
Mitterbauer, F.
;
Kernstock, C.
;
Karner, H. W.
;
Stanojevic, Z.
;
Weckx, Pieter  
;
Hellings, Geert  
;
Claes, Dieter  
;
Wu, Zhicheng  
;
Xiang, Yang  
;
Chiarella, Thomas  
;
Parvais, Bertrand  
;
Mitard, Jerome  
;
Franco, Jacopo  
;
Kaczer, Ben  
;
Linten, Dimitri  

Journal

na

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1960 since deposited on 2022-03-11
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Acq. date: 2025-12-10

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1960 since deposited on 2022-03-11
2last month
Acq. date: 2025-12-10

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