Publication:

A defect characterization technique for the sidewall surface of Nano-ridge and Nanowire based Logic and RF technologies

Date

2021

Proceedings Paper

https://doi.org/10.1109/IRPS46558.2021.9405095

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Author(s)

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Vondkar Kodandarama, Komal

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Kunert, Bernardette

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Collaert, Nadine

Journal

na

Statistics

1927 since deposited on 2022-03-11

Acq. date: 2026-02-25