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A defect characterization technique for the sidewall surface of Nano-ridge and Nanowire based Logic and RF technologies
Publication:
A defect characterization technique for the sidewall surface of Nano-ridge and Nanowire based Logic and RF technologies
Date
2021
Proceedings Paper
https://doi.org/10.1109/IRPS46558.2021.9405095
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hsu, B.
;
Syshchyk, O.
;
Vais, Abhitosh
;
Yu, Hao
;
Alian, AliReza
;
Mols, Yves
;
Vondkar Kodandarama, Komal
;
Kunert, Bernardette
;
Waldron, Niamh
;
Simoen, Eddy
;
Collaert, Nadine
Journal
na
Abstract
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1927
since deposited on 2022-03-11
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Acq. date: 2025-10-31
Citations
Metrics
Views
1927
since deposited on 2022-03-11
2
last week
Acq. date: 2025-10-31
Citations