Authors

Liang, Boshen; Paquet, Louis; Jeong, Yongbin; Heremans, Paul; Cheyns, David

DOI

10.1109/NEMS51815.2021.9451478

EISBN

978-0-7381-2429-2

ISSN

2474-3747

Conference

16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS)

Journal

na

Title

DESIGN AND FABRICATION OF INTEGRATED PIEZOELECTRIC MICROPUMP WITH VORTEX ENHANCEMENT OPTIMIZATION

Publication type

Proceedings paper