Show simple item record

DESIGN AND FABRICATION OF INTEGRATED PIEZOELECTRIC MICROPUMP WITH VORTEX ENHANCEMENT OPTIMIZATION

dc.contributor.authorLiang, Boshen
dc.contributor.authorPaquet, Louis
dc.contributor.authorJeong, Yongbin
dc.contributor.authorHeremans, Paul
dc.contributor.authorCheyns, David
dc.date.accessioned2022-03-14T10:57:13Z
dc.date.available2022-03-14T10:57:13Z
dc.date.issued2021
dc.identifier.issn2474-3747
dc.identifier.otherWOS:000693407600171
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39429
dc.sourceWOS
dc.titleDESIGN AND FABRICATION OF INTEGRATED PIEZOELECTRIC MICROPUMP WITH VORTEX ENHANCEMENT OPTIMIZATION
dc.typeProceedings paper
dc.contributor.imecauthorLiang, Boshen
dc.contributor.imecauthorPaquet, Louis
dc.contributor.imecauthorJeong, Yongbin
dc.contributor.imecauthorHeremans, Paul
dc.contributor.imecauthorCheyns, David
dc.contributor.orcidimecLiang, Boshen::0000-0003-3299-9034
dc.contributor.orcidimecHeremans, Paul::0000-0003-2151-1718
dc.contributor.orcidimecCheyns, David::0000-0002-1327-8752
dc.identifier.doi10.1109/NEMS51815.2021.9451478
dc.identifier.eisbn978-0-7381-2429-2
dc.source.numberofpages4
dc.source.peerreviewyes
dc.source.beginpage1423
dc.source.endpage1426
dc.source.conference16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS)
dc.source.conferencedateAPR 25-29, 2021
dc.source.conferencelocationXiamen
dc.source.journalna
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record