dc.contributor.author | Mehendale, M. | |
dc.contributor.author | Antonelli, A. | |
dc.contributor.author | Mair, R. | |
dc.contributor.author | Mukundhan, P. | |
dc.contributor.author | Bogdanowicz, Janusz | |
dc.contributor.author | Charley, Anne-Laure | |
dc.contributor.author | Leray, Philippe | |
dc.contributor.author | Yasin, Farrukh | |
dc.contributor.author | Crotti, Davide | |
dc.date.accessioned | 2022-03-16T13:26:18Z | |
dc.date.available | 2022-03-16T13:26:18Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 1078-8743 | |
dc.identifier.other | WOS:000680838600001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39449 | |
dc.source | WOS | |
dc.title | IMAGING OF OVERLAY AND ALIGNMENT MARKERS UNDER OPAQUE LAYERS USING PICOSECOND LASER ACOUSTIC MEASUREMENTS AM: Advanced Metrology | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Bogdanowicz, Janusz | |
dc.contributor.imecauthor | Charley, Anne-Laure | |
dc.contributor.imecauthor | Leray, Philippe | |
dc.contributor.imecauthor | Yasin, Farrukh | |
dc.contributor.imecauthor | Crotti, Davide | |
dc.contributor.orcidimec | Bogdanowicz, Janusz::0000-0002-7503-8922 | |
dc.contributor.orcidimec | Yasin, Farrukh::0000-0002-7295-0254 | |
dc.identifier.doi | 10.1109/ASMC51741.2021.9435649 | |
dc.identifier.eisbn | 978-1-7281-8645-0 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.conference | 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) | |
dc.source.conferencedate | MAY 10-12, 2021 | |
dc.source.conferencelocation | Virtual | |
dc.source.journal | na | |
imec.availability | Published - imec | |