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MULTI-FREQUENCY IMAGING WITH A CMOS COMPATIBLE SCANDIUM DOPED ALUMINUM NITRIDE PMUT ARRAY
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Authors
Billen, Margo
;
Gao, Hang
;
Marigo, Eloi
;
Soundara-Pandian, Mohan
;
Tabruyn, Dries
;
Helin, Philippe
;
Rochus, Veronique
DOI
10.1109/MEMS51782.2021.9375183
EISBN
978-1-6654-1912-3
ISSN
1084-6999
Conference
34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Journal
na
Title
MULTI-FREQUENCY IMAGING WITH A CMOS COMPATIBLE SCANDIUM DOPED ALUMINUM NITRIDE PMUT ARRAY
Publication type
Proceedings paper
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