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MULTI-FREQUENCY IMAGING WITH A CMOS COMPATIBLE SCANDIUM DOPED ALUMINUM NITRIDE PMUT ARRAY

dc.contributor.authorBillen, Margo
dc.contributor.authorGao, Hang
dc.contributor.authorMarigo, Eloi
dc.contributor.authorSoundara-Pandian, Mohan
dc.contributor.authorTabruyn, Dries
dc.contributor.authorHelin, Philippe
dc.contributor.authorRochus, Veronique
dc.date.accessioned2022-03-16T13:37:55Z
dc.date.available2022-03-16T13:37:55Z
dc.date.issued2021
dc.identifier.issn1084-6999
dc.identifier.otherWOS:000667731600226
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39450
dc.sourceWOS
dc.titleMULTI-FREQUENCY IMAGING WITH A CMOS COMPATIBLE SCANDIUM DOPED ALUMINUM NITRIDE PMUT ARRAY
dc.typeProceedings paper
dc.contributor.imecauthorBillen, Margo
dc.contributor.imecauthorGao, Hang
dc.contributor.imecauthorTabruyn, Dries
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorRochus, Veronique
dc.contributor.orcidimecBillen, Margo::0000-0002-0189-7388
dc.contributor.orcidimecRochus, Veronique::0000-0001-9680-5724
dc.identifier.doi10.1109/MEMS51782.2021.9375183
dc.identifier.eisbn978-1-6654-1912-3
dc.source.numberofpages4
dc.source.peerreviewyes
dc.source.beginpage907
dc.source.endpage910
dc.source.conference34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
dc.source.conferencedateJAN 25-29, 2021
dc.source.conferencelocationVirtual
dc.source.journalna
imec.availabilityPublished - imec


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