Publication:

Nanosheet FETs and their Potential for Enabling Continued Moore's Law Scaling

Date

2021

Proceedings Paper

https://doi.org/10.1109/EDTM50988.2021.9420942

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Author(s)

Veloso, Anabela

;

;

De Keersgieter, An

;

;

;

Matagne, Philippe

;

Dentoni Litta, Eugenio

;

Ryckaert, Julien

;

Horiguchi, Naoto

Journal

na

Metrics

1864 since deposited on 2022-03-16

Acq. date: 2025-12-16