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Nanosheet FETs and their Potential for Enabling Continued Moore's Law Scaling

dc.contributor.authorVeloso, Anabela
dc.contributor.authorEneman, Geert
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorJang, Doyoung
dc.contributor.authorMertens, Hans
dc.contributor.authorMatagne, Philippe
dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorRyckaert, Julien
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2022-03-16T13:54:18Z
dc.date.available2022-03-16T13:54:18Z
dc.date.issued2021
dc.identifier.issnna
dc.identifier.otherWOS:000675595800128
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39454
dc.sourceWOS
dc.titleNanosheet FETs and their Potential for Enabling Continued Moore's Law Scaling
dc.typeProceedings paper
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorJang, Doyoung
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorMatagne, Philippe
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecDentoni Litta, Eugenio::0000-0003-0333-376X
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.identifier.doi10.1109/EDTM50988.2021.9420942
dc.identifier.eisbn978-1-7281-8176-9
dc.source.numberofpages3
dc.source.peerreviewyes
dc.source.conference5th IEEE Electron Devices Technology and Manufacturing Conference (EDTM)
dc.source.conferencedateAPR 08-11, 2021
dc.source.conferencelocationChengdu
dc.source.journalna
imec.availabilityPublished - imec


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