Publication:

ALD Encapsulation of CVD WS2 for Stable and High-Performance FET Devices

Date

2021

Proceedings Paper

https://doi.org/10.1109/EDTM50988.2021.9420940

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Author(s)

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De Marneffe, Jean-Francois

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Groven, Benjamin

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Sergeant, Stefanie

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Asselberghs, Inge

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Journal

na

Metrics

1889 since deposited on 2022-03-16

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Acq. date: 2026-01-09