Publication:
CD-control comparison for sub-0.18μm patterning using 248 nm lithography and strong resolution enhancement techniques
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2 since deposited on 2021-10-14
Acq. date: 2026-02-26
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2119 since deposited on 2021-10-14
Acq. date: 2026-02-26
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2 since deposited on 2021-10-14
Acq. date: 2026-02-26
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2119 since deposited on 2021-10-14
Acq. date: 2026-02-26
Citations