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HBM and CDM ESD Performance of Advanced Silicon Photonic Components

dc.contributor.authorChen, Shih-Hung
dc.contributor.authorKarp, James
dc.contributor.authorSimicic, Marko
dc.contributor.authorTsiara, Artemisia
dc.contributor.authorTsaggaris, Dean
dc.contributor.authorCroes, Kristof
dc.contributor.authorBan, Yoojin
dc.contributor.authorTan, Phoumra
dc.contributor.authorDe Heyn, Peter
dc.contributor.authorChang, Jonathan
dc.contributor.authorHart, Michael J.
dc.contributor.authorWu, Xin
dc.contributor.authorLinten, Dimitri
dc.contributor.authorVan Campenhout, Joris
dc.date.accessioned2022-05-05T02:17:40Z
dc.date.available2022-05-05T02:17:40Z
dc.date.issued2021
dc.identifier.issn0739-5159
dc.identifier.otherWOS:000786179000022
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39745
dc.sourceWOS
dc.titleHBM and CDM ESD Performance of Advanced Silicon Photonic Components
dc.typeProceedings paper
dc.contributor.imecauthorChen, Shih-Hung
dc.contributor.imecauthorSimicic, Marko
dc.contributor.imecauthorTsiara, Artemisia
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorBan, Yoojin
dc.contributor.imecauthorDe Heyn, Peter
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorVan Campenhout, Joris
dc.contributor.orcidimecSimicic, Marko::0000-0002-3623-1842
dc.contributor.orcidimecTsiara, Artemisia::0000-0002-5612-6468
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecDe Heyn, Peter::0000-0003-3523-7377
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecVan Campenhout, Joris::0000-0003-0778-2669
dc.identifier.eisbn978-1-58537-329-1
dc.source.numberofpages7
dc.source.peerreviewyes
dc.source.conference43rd Annual EOS/ESD Symposium (EOS/ESD)
dc.source.conferencedateSEP 26-OCT 01, 2021
dc.source.conferencelocationTucson
imec.availabilityUnder review


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420.500.12860/39745.42022-08-26T08:52:04Zvalidation by library/open access desk
320.500.12860/39745.32022-08-18T08:53:38Zvalidation by imec author
120.500.12860/39745*2022-05-05T02:17:40Z

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