HBM and CDM ESD Performance of Advanced Silicon Photonic Components

Abstract

ESD robustness for self-protected advanced Silicon photonic components integrated into optical interposers is reported, including industry-first CDM data. HBM performance in reverse bias polarity is shown to be the limiting factor and is correlated to the optical component width. The Ge-EAM modulator with heater is found to be the weakest element CDM-wise.