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Wafer-Level LICCDM Device Testing
dc.contributor.author | Simicic, Marko | |
dc.contributor.author | Wu, Wei-Min | |
dc.contributor.author | Claes, Dieter | |
dc.contributor.author | Tamura, Shinichi | |
dc.contributor.author | Shimada, Yohei | |
dc.contributor.author | Sawada, Masanori | |
dc.contributor.author | Chen, Shih-Hung | |
dc.date.accessioned | 2022-05-16T07:58:45Z | |
dc.date.available | 2022-05-05T02:17:41Z | |
dc.date.available | 2022-05-16T07:58:45Z | |
dc.date.issued | 2021 | |
dc.identifier.isbn | 978-1-58537-330-7 | |
dc.identifier.issn | 0739-5159 | |
dc.identifier.other | WOS:000786179000028 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39751.2 | |
dc.source | WOS | |
dc.title | Wafer-Level LICCDM Device Testing | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Simicic, Marko | |
dc.contributor.imecauthor | Wu, Wei-Min | |
dc.contributor.imecauthor | Claes, Dieter | |
dc.contributor.imecauthor | Chen, Shih-Hung | |
dc.contributor.orcidimec | Simicic, Marko::0000-0002-3623-1842 | |
dc.identifier.doi | 10.23919/EOS/ESD52038.2021.9574789 | |
dc.identifier.eisbn | 978-1-58537-329-1 | |
dc.source.numberofpages | 8 | |
dc.source.peerreview | yes | |
dc.subject.discipline | Electrical & electronic engineering | |
dc.source.conference | 43rd Annual EOS/ESD Symposium (EOS/ESD) | |
dc.source.conferencedate | SEP 26-OCT 01, 2021 | |
dc.source.conferencelocation | Tucson | |
dc.source.journal | N/A | |
imec.availability | Under review |