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Wafer-Level LICCDM Device Testing

dc.contributor.authorSimicic, Marko
dc.contributor.authorWu, Wei-Min
dc.contributor.authorClaes, Dieter
dc.contributor.authorTamura, Shinichi
dc.contributor.authorShimada, Yohei
dc.contributor.authorSawada, Masanori
dc.contributor.authorChen, Shih-Hung
dc.date.accessioned2022-05-05T02:17:41Z
dc.date.available2022-05-05T02:17:41Z
dc.date.issued2021
dc.identifier.issn0739-5159
dc.identifier.otherWOS:000786179000028
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39751
dc.sourceWOS
dc.titleWafer-Level LICCDM Device Testing
dc.typeProceedings paper
dc.contributor.imecauthorSimicic, Marko
dc.contributor.imecauthorWu, Wei-Min
dc.contributor.imecauthorClaes, Dieter
dc.contributor.imecauthorChen, Shih-Hung
dc.contributor.orcidimecSimicic, Marko::0000-0002-3623-1842
dc.identifier.eisbn978-1-58537-329-1
dc.source.numberofpages8
dc.source.peerreviewyes
dc.source.conference43rd Annual EOS/ESD Symposium (EOS/ESD)
dc.source.conferencedateSEP 26-OCT 01, 2021
dc.source.conferencelocationTucson
imec.availabilityUnder review


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320.500.12860/39751.32022-06-28T13:59:47Zvalidation by library/open access desk
220.500.12860/39751.22022-05-16T07:38:44Zvalidation by imec author
120.500.12860/39751*2022-05-05T02:17:41Z

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