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Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO2 Patterns
dc.contributor.author | Viva, Alessandro | |
dc.contributor.author | Pasquali, Mattia | |
dc.contributor.author | Carolan, Patrick | |
dc.contributor.author | Sergeant, Stefanie | |
dc.contributor.author | Meersschaut, Johan | |
dc.contributor.author | Conard, Thierry | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Armini, Silvia | |
dc.date.accessioned | 2022-05-06T08:19:21Z | |
dc.date.available | 2022-05-06T08:19:21Z | |
dc.date.issued | 2022-03-29 | |
dc.identifier.issn | 2637-6113 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39760 | |
dc.title | Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO2 Patterns | |
dc.type | Journal article | |
dc.contributor.imecauthor | Pasquali, Mattia | |
dc.contributor.imecauthor | Carolan, Patrick | |
dc.contributor.imecauthor | Sergeant, Stefanie | |
dc.contributor.imecauthor | Meersschaut, Johan | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Armini, Silvia | |
dc.contributor.orcidext | Alessandro, Viva::0000-0002-6349-8075 | |
dc.contributor.orcidimec | Pasquali, Mattia::0000-0002-1309-1082 | |
dc.contributor.orcidimec | Carolan, Patrick::0000-0001-5931-3093 | |
dc.contributor.orcidimec | Sergeant, Stefanie::0000-0001-9923-0903 | |
dc.contributor.orcidimec | Meersschaut, Johan::0000-0003-2467-1784 | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
dc.identifier.doi | https://doi.org/10.1021/acsaelm.1c01348 | |
dc.source.numberofpages | 12 | |
dc.source.peerreview | no | |
dc.source.beginpage | 1703 | |
dc.source.endpage | 1714 | |
dc.source.journal | ACS Applied Electronic Materials | |
dc.source.issue | 4 | |
dc.source.volume | 4 | |
imec.availability | Published - open access |