Publication:

Impact of mask corner rounding on pitch 40 nm contact hole variability

Date

2021

Proceedings Paper

https://doi.org/10.1117/12.2601850

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Author(s)

van Look, Lieve

;

Gillijns, Werner

;

Gallagher, Emily

Journal

Proceedings of SPIE

Metrics

1327 since deposited on 2022-05-22

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Acq. date: 2025-12-12