Publication:

Towards high NA patterning readiness: Materials, processes and etch transfer for P24 Line Space

Date

2021

Proceedings Paper

https://doi.org/10.1117/12.2601839

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Author(s)

Santaclara, J. G.

;

;

;

Franke, Joern-Holger

;

Schleicher, Filip

;

;

Bezard, Philippe

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;

Hendrickx, Eric

;

Journal

Proceedings of SPIE

Statistics

1715 since deposited on 2022-05-22

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Acq. date: 2026-03-17