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A high-throughput silicon microphysiometer

dc.contributor.authorVerhaegen, Katarina
dc.contributor.authorBaert, Kris
dc.contributor.authorPuers, Bob
dc.contributor.authorSansen, Willy
dc.contributor.authorSimaels, J.
dc.contributor.authorVan Driessche, W.
dc.contributor.authorHermans, Lou
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-14T11:54:28Z
dc.date.available2021-10-14T11:54:28Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3998
dc.sourceIIOimport
dc.titleA high-throughput silicon microphysiometer
dc.typeOral presentation
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorMertens, Robert
dc.source.peerreviewno
dc.source.conferenceBiOS'99; 23-29 February 1999; San Francisco, Ca, USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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