Browsing Conference contributions by author "Babulnath, Raghav"

Now showing items 1-2 of 2

EUV stochastic defect monitoring with advanced broadband optical wafer inspection and e-beam review systems

Sah, Kaushik; Cross, Andrew; Plihal, Martin; Anantha, Vidyasagar; Babulnath, Raghav; Fung, Derek; De Bisschop, Peter; Halder, Sandip (2018)
High sensitivity repeater detection with broadband plasma optical wafer inspection for mask defect qualification

Cross, Andrew; Sah, Kaushik; Anantha, Vidyasagar; Gupta, Balarka; Ynzunza, Ramon; Troy, Neil; Wu, Kenong; Babulnath, Raghav; Rajendran, Meghna; Van den Heuvel, Dieter; Leray, Philippe (2020)