Browsing Conference contributions by imec author "2c3873d600ffe6994b1ba17dcc2120c2c2f3b401"
Now showing items 1-8 of 8
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Atomic layer deposited barriers for copper interconnects
Schuhmacher, Jorg; Martin Hoyas, Ana; Ernur, Didem; Tokei, Zsolt; Travaly, Youssef; Bruynseraede, Christophe; Satta, Alessandra; Whelan, Caroline; Shamiryan, Denis; Beyer, Gerald; Abell, Thomas; Sutcliffe, Victor; Schaekers, Marc; Maex, Karen (2004) -
Copper grain growth in reduced dimensions
Brongersma, Sywert; Vanstreels, Kris; Wu, W.; Zhang, Wenqi; Ernur, Didem; D'Haen, Jan; Terzieva, Valentina; Van Hove, Marleen; Clarysse, Trudo; Carbonell, Laure; Vandervorst, Wilfried; De Ceuninck, Ward; Maex, Karen (2004-06) -
Corrosion of the copper damascene interconnects as a function of the electrochemical plating process parameters
Ernur, Didem; Wu, Wen; Brongersma, Sywert; Terzieva, Valentina; Maex, Karen (2004) -
Galvanic corrosion testing of WCxNy barrier metal in H202 based slurries
Ernur, Didem; Schuhmacher, Jörg; Terzieva, Valentina; Shamiryan, Denis; Maex, Karen (2003) -
Influence of electrochemical plating process parameters on corrosion of Cu damascene interconnects
Ernur, Didem; Wu, Wen; Brongersma, Sywert; Terzieva, Valentina; Maex, Karen (2004) -
Inhibition of galvanic corrosion of WNC barrier metal for reliable Cu CMP
Ernur, Didem; Terzieva, Valentina; Schuhmacher, Jorg; Maex, Karen (2004) -
Narrow trench corrosion
Ernur, Didem; Kondo, Seiichi; Maex, Karen (2002) -
The impact of annealing on the corrosion mechanism of copper films
Ernur, Didem; Carbonell, Laure; Maex, Karen (2003)