Browsing Conference contributions by imec author "3274663aa8d365045939bd2e4bb8fb1d00bc2461"
Now showing items 1-3 of 3
-
Device Scaling roadmap and its implications for Logic and Analog platform
Spessot, Alessio; Parvais, Bertrand; Rawat, Amita; Miyaguchi, Kenichi; Weckx, Pieter; Jang, Doyoung; Ryckaert, Julien (2020) -
Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner- spacers and Epi-induced Stress: Understanding & Mitigating Process Risks
Rawat, Amita; Bhuwalka, Krishna; Matagne, Philippe; Vermeersch, Bjorn; Wu, Hao; Hellings, Geert; Ryckaert, Julien; Liu, Changze (2021) -
Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner-spacers and Epi-induced Stress: Understanding & Mitigating Process Risks
Rawat, Amita; Bhuwalka, Krishna K.; Matagne, Philippe; Vermeersch, Bjorn; Wu, Hao; Hellings, Geert; Ryckaert, Julien; Liu, Changze (2021)