Browsing Conference contributions by imec author "384c8b8e5b7509eea5e59a1bdffdeb64fc937058"
Now showing items 1-3 of 3
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Impact of acid statistics on EUV local critical dimension uniformity
Jiang, Jing; De Simone, Danilo; Yildirim, Oktay; Meeuwissen, Marieke; Hoefnagels, Rik; Rispens, Gijs; Derks, Paul; Custers, Rolf (2017) -
Intra-field etch induced overlay penalties
van Haren, Richard; Yildirim, Oktay; Mouraille, Orion; van Dijk, Leon; Kumar, Kaushik; Feurprier, Yannick; Hermans, Jan (2020) -
On product overlay characterization after stressed layer etch
van Haren, Richard; Mouraille, Orion; Yildirim, Oktay; Van Dijk, Leon; Kumar, Kaushik; Feurprier, Yannick; Hermans, Jan (2021)