Browsing Conference contributions by author "Rakhimova, T"
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Effect of VUV photons on low-k OSG damage and etching by F atoms at the lowered temperature
Lopaev, D; Rakhimova, T; Mankelevich, Y; Kurchikov, K.; Zyryanov, S.; Zotovich, A.; Baklanov, Mikhaïl (2015)