Browsing Conference contributions by author "Fang, Wei"
Now showing items 1-2 of 2
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Process window and defect monitoring using high-throughput e-beam inspection guided by computational hot spot detection
Wang, Fei; Zhang, Pencheng; Fang, Wei; Liu, Kevin; Jau, Jack; Wang, Lester; Wan, Alex; Hunsche, Stefan; Halder, Sandip; Leray, Philippe (2016) -
Study of design-based e-beam defect inspection for hotspot detection and process window characterization on 10nm logic device
Halder, Sandip; Leray, Philippe; Di Lorenzo, Paolo; Wang, Fei; Zhang, Pengcheng; Fang, Wei; Liu, Kevin; Jau, Jack (2016)