Browsing Conference contributions by author "Na, Hoon Jo"

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Thermal budget impact on HKMG Al2O3 and La-based stacks for 2x DRAM periphery transistors

Ritzenthaler, Romain; Schram, Tom; Spessot, Alessio; Caillat, Christian; Na, Hoon Jo; Lee, Sun Ghil; Son, Yunik; Noh, Kyung Bong; Aoulaiche, Marc; Arimura, Hiroaki; Horiguchi, Naoto; Fazan, Pierre; Thean, Aaron (2014)