Browsing Conference contributions by author "Jack, Kevin"

Now showing items 1-2 of 2

Development of non-chemically amplified photoresists for extreme ultraviolet (EUV) lithography

Lawrie, Kirsten; Blakey, Idriss; Blinco, James; Gronheid, Roel; Jack, Kevin; Pollentier, Ivan; Leeson, Michael; Younkin, Todd R.; Whittaker, Andrew K. (2009)
Poly(olefin sulfone)s - A materials platform for studying resist derived contamination

Lawrie, Kirsten; Blakey, Idriss; Blinco, James; Gronheid, Roel; Jack, Kevin; Pollentier, Ivan; Leeson, Michael; Younkin, Todd; Whittaker, Andrew (2010)