Browsing Conference contributions by imec author "9933caa2fda7ba29d13e7dcd5c984c2d298106c4"

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    • Scaled-down deposited underlayers for EUV lithography 

      Gupta, Mihir; Afonso, Joao Antunes; Bezard, Philippe; Vallat, Remi; Fallica, Roberto; Suh, Hyo Seon; Halder, Sandip; De Simone, Danilo; Liu, Zecheng; Ran, Fanyong; Fukuda, Hideaki; Sun, Yiting; De Roest, David; Piumi, Daniele (2023)