Browsing Conference contributions by author "Fanucchi, Eric"
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Comparisons of 9% versus 6% transmission attenuated phase-shift mask for the 65nm device mode
Montgomery, Patrick K.; Lucas, Kevin D.; Litt, Lloyd C.; Conley, Will; Fanucchi, Eric; van Wingerden, Johannes; Vandenberghe, Geert; Wiaux, Vincent; Taylor, Darren; Cangemi, Michael J.; Kasprowicz, Bryan (2003-12)