Browsing Conference contributions by author "Vaid, Varun"
Now showing items 1-3 of 3
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DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec
Pathangi Sriraman, Hari; Vaid, Varun; Chan, BT; Vandenbroeck, Nadia; Li, Jin; Hong, Sung Eun; Cao, Yi; Durairaj, Baskaran; Lin, Guanyang; Somervell, Mark; Kitano, Takahiro; Harukawa, Ryota; Sah, Kaushik; Cross, Andrew; Bayana, Hareen; D'Urzo, Lucia; Gronheid, Roel (2016) -
Improved cost-effectiveness of the block co-polymer anneal process for DSA
Pathangi Sriraman, Hari; Stokhof, Maarten; Knaepen, Werner; Vaid, Varun; Mallik, Arindam; Chan, BT; Vandenbroeck, Nadia; Maes, Jan; Gronheid, Roel (2016) -
Towards cost-effective and low defectivity DSA flows for line/space patterning
Pathangi Sriraman, Hari; Mallik, Arindam; Chan, BT; Vaid, Varun; Vandenbroeck, Nadia; Li, Jin; Hong, Sung Eun; Gronheid, Roel (2015)