Browsing Conference contributions by author "Uedono, Akira"
Now showing items 1-4 of 4
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Characterization of extreme Si thinning proces for wafer-to-wafer stacking
Inoue, Fumihiro; Jourdain, Anne; De Vos, Joeri; Peng, Lan; Liebens, Maarten; Armini, Silvia; Uedono, Akira; Rebibis, Kenneth June; Miller, Andy; Beyne, Eric; Sleeckx, Erik (2016) -
Characterization of porous low-k dielectric films by using positron annihilation
Uedono, Akira; Armini, Silvia; Krause-Rehberg, R; Wagner, A (2018) -
Defect identification in bonding surface layer by positron annihilation spectroscopy
Inoue, Fumihiro; Peng, Lan; Iacovo, Serena; Nagano, Fuya; Sleeckx, Erik; Beyer, Gerald; Uedono, Akira; Beyne, Eric (2019) -
The influence of AlN nucleation layer on Radio Frequency (RF) transmission loss of GaN-on-Si structure
Chang, Shane; Zhao, Ming; Spampinato, Valentina; Franquet, Alexis; Hein, Do; Uedono, Akira; Chang, Li (2019)